Advanced Electron Microscopy For Materials Science
Feb 18, 2024
3. Extension of In Situ Studies on Collective Motion of Secondary Electrons
Raws li cov kev tshawb fawb no ntawm kev faib cov hluav taws xob theem nrab ntawm cov yeeb yaj kiab insulating, hauv situ thwmsim tuaj yeem ua los tshawb xyuas qhov cuam tshuam ntawm cov qauv insulating. Daim duab 5 qhia txog cov txiaj ntsig ntawm qhov kev tshawb fawb hauv qhov kev hloov pauv hluav taws xob thiab kev hloov pauv hauv cov khoom siv hluav taws xob theem nrab ntawm ob cov ntaub ntawv insulating: ib tug square ncej ntawm epoxy resin npaj los ntawm FIB txoj kev nrog Ga + ions, thiabib tug flake ntawm lub raum ntaub so ntswgembedded nyob rau hauv epoxy resin thiab npaj los ntawm microtomy.70) Geometric configurations ntawm tus ncej square thiabcev flakemuaj nyob rau hauv daim duab 5(c). Tus ncej square ntawm epoxy resin teeb nyob rau hauv lub piezo tsav kev sojntsuam ntawm ib tug TEM specimen holder56) mus txog lubcev flakemaj mam.
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Nyob rau hauv lub reconstructed theem dluab ntawm daim duab 5(a), vim hais tias ntawm kev sib nrig sib irradiation nrog lwm yam electrons, lub zog hluav taws xob ntawm ob qho tib si specimens txo qis raws li lawv sib cais. Nyob rau hauv lub reconstructed amplitude dluab nyob rau hauv daim duab 5(b), liab- thiab daj-xim cheeb tsam raug pom nyob ib ncig ntawm lubcev flaketab sis tsis nyob ib ncig ntawm tus ncej square, uas yog raws li cov kev soj ntsuam uas tau nthuav tawm hauv daim duab 4. Thaum qhov kev sib cais ntawm cov qauv poob qis dua li ntawm 1 µm, feem ntau ntawm cov xim liab-thiab xim daj-xim av tau ploj mus, qhia tias muaj pes tsawg tus ntawm cov khoom sib cais. Secondary electrons nyob ib ncig ntawm lub raum flake. Txawm li cas los xij, cov cheeb tsam xim faint tseem nyob hauv cheeb tsam sab xis, qee qhov deb ntawm tus ncej ntawm epoxy resin. Lub visibilities ntawm kev cuam tshuam fringes nyob rau hauv ob lub ntsuab "f" thiab daj "e" square cheeb tsam qhia nyob rau hauv lub sab laug ntawm daim duab ntawm daim duab 5(a) yog muab piv raws li lub zog ntawm kev sib cais ntawm cov qauv, raws li qhia nyob rau hauv daim duab 5( d), raws li tus ncej txav mus rau ( ) lossis deb ntawm ( ) lubcev flake. Ib qho tseem ceeb nce nyob rau hauv visibility yog pom nyob rau hauv lub daj square nyob ze ntawm lub raum flake thaum lub square ncej ntawm epoxy resin mus rau lub raum flake nto. Qhov txo qis ntawm cov hluav taws xob thib ob ntawm lub raum flake tshwm sim los ntawm qhov muaj cov txheej txheem hluav taws xob nyob rau saum npoo ntawm epoxy resin, los ntawm cov khoom siv hluav taws xob thib ob tau xa mus.
Raws li tau sau tseg, kev sib sau thiab kev sib koom ua ke ntawm cov hluav taws xob nyob ib puag ncig ntawm ntau yam zoo insulators tau pom los ntawm cov txheej txheem rov tsim dua tshiab hauv electron holography. Cov kev sim no tau ua los ntawm TEM nrog cov txheej txheem nyias nyias. Ntawm no, peb qhia tau hais tias cov teebmeem zoo sib xws ntawm cov khoom siv hluav taws xob thib ob, uas tau ntxim nyiam txawm tias muaj qhov sib txawv ntawm cov insulators, tuaj yeem pom los ntawm kev tshuaj ntsuam ion microscopy (SIM) nrog FIB system. Qhov zoo tshaj plaws ntawm qhov tshwm sim pom los ntawm TEM thiab SIM yog qhov zoo them nqi ntawm cov insulators. Nyob rau hauv rooj plaub tom kawg, thaum lub sij hawm soj ntsuam SIM, Ga{{0}} ion sojntsuam yog siv los luam theej duab cov khoom insulator nto. Ntawm txhua qhov chaw hauv cheeb tsam scanned, cov khoom siv hluav taws xob thib ob raug tso tawm los ntawm qhov chaw loj, qhov Ga + ions sib sau ua ke hauv cov qauv loj, ua rau muaj txiaj ntsig zoo. Daim duab 6 qhia txog ib qho piv txwv uas W Islands tau muab tso rau ntawm mica substrate los ua tus cwj pwm "e" thiab cov cim sau ntawv sau, "¹". Daim duab 6(a) sib raug rau lub xeev thawj zaug uas W Islands tsis tau kov los ntawm +5 V-biased sojntsuam koob. Thaum qhov kev sojntsuam kov ib lub Islands tuaj, "¹", lwm cov kob, "e", kuj tau ua kom ci dua (Fig. 6(b)), implying tus nqi hloov ntawm cov kob "¹" mus rau cov kob "e" nrog. Lub hav zoov ntawm cov ntsiab lus hlau Ga thiab W ntawm mica substrate zoo li rooj plaub ntawm epoxy nyias zaj duab xis hauv daim duab 4. Lub hav zoov ntawm W tshwm sim los ntawm nws qhov kev sib kis thaum lub sij hawm deposition txheej txheem. Thaum qhov kev sojntsuam ncaj qha hu rau tus cwj pwm "e", nws tau ua kom ci dua (Daim duab 6(c)). Ntawm qhov tod tes, hauv daim duab 6(d), tus cwj pwm "¹" rov ua kom ci dua thaum kov los ntawm kev sojntsuam tab sis tus "e" tsis ci. Kev soj ntsuam SIM tau txuas ntxiv rau 48 s los ntawm scene (b) mus rau scene (d), thiab qhov koob tshuaj Ga+ nominal nyob rau lub sijhawm no yog 0.027 (C m¹2) lossis 0.17 (ion nm¹2 ). Nyob rau hauv daim duab 6(d), nws tau txiav txim siab tias qhov zoo tshaj plaws sputtering ntawm tus qauv nto los ntawm Ga+ ions ua rau muaj qhov sib txawv ntawm qhov chaw ntawm daim duab 6(b) thiab (c).
4. Cov ntsiab lus
Kev tshawb fawb txog kev lag luam microstructure thiab electromagnetic teb tsom xam siv TEM txuas ntxiv. Cov qauv tshiab ntawm cov qauv microstructure thiab electromagnetic teb tsom xam tau tham nyob rau hauv lub rooj sib tham ntawm 27th Lub Rooj Sib Tham ntawm Cov Khoom Siv Science thiab Engineering Research Society, muaj nyob rau hauv lub koom haum ntawm Multidisciplinary Research rau Advanced Materials, Tohoku University, nrog lub ntsiab lus ntawm "Tsis ntev los no Trends in Materials Properties and Microscopy Techniques." Raws li lub rooj sib tham no, qee qhov kev hloov pauv tsis ntev los no cuam tshuam nrog TEM kev tshuaj ntsuam xyuas tau luam tawm thaum Lub Kaum Hli 2019 hauv qhov teeb meem tshwj xeeb ntawm Cov Khoom Siv Kev Lag Luam (Vol. 60, No. 10) nyob rau hauv lub npe "Kev Tsim Kho thiab Kev Siv Advanced Electron Microscopy Techniques for Materials Science". Raws li kev txuas ntxiv ntawm electron holography ntawm cov khoom siv hluav taws xob thib ob nyob ib puag ncig cov qauv insulating, kev sib cuam tshuam ntawm cov qauv no tau qhia meej los ntawm kev sim sim. Tsis tas li ntawd, cov teebmeem zoo sib xws ntawm cov khoom siv hluav taws xob thib ob, uas tau nyiam rau ntawm qhov chaw ntawm cov insulators, kuj tau pom los ntawm SIM nrog FIB system. Cov no nyob rau hauv qhov kev sim ntawm cov khoom siv hluav taws xob theem nrab yuav tsum tau ua kom dav thiab ntsuas qhov ntau sai sai.
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